From booth at snf.stanford.edu Wed Apr 4 10:44:46 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 4, 2001 10:44:46 AM Subject: Shutdown pquest 2001-04-04 10:44:45: Need to install new bottle of BCl3. Message-ID: From sigari at snf.stanford.edu Wed Apr 25 12:04:23 2001 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Apr 25, 2001 12:04:23 PM Subject: Problem pquest 2001-04-25 12:04:21: Message-ID: software problem. It held my wafer in the load lock and waiting for gate valve to open. From sigari at snf.stanford.edu Wed Apr 25 12:22:19 2001 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Apr 25, 2001 12:22:19 PM Subject: Shutdown pquest 2001-04-25 12:22:18: Message-ID: software problem. the system started the etch process before loading the wafer in. My wafer is stuck in load luck From mcvittie at snf.stanford.edu Wed Apr 25 03:18:45 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Apr 25, 2001 3:18:45 PM Subject: Shutdown pquest 2001-04-25 12:22:18: Reset Trubo pump Message-ID: From mcvittie at snf.stanford.edu Wed Apr 25 03:20:13 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Apr 25, 2001 3:20:13 PM Subject: Problem pquest 2001-04-25 15:20:11: Load Lock has large leak. Jim Message-ID: From sigari at snf.stanford.edu Wed Apr 25 03:39:54 2001 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Apr 25, 2001 3:39:54 PM Subject: Shutdown pquest 2001-04-25 15:39:53: Message-ID: wafer is dropped in the system. The pins were in up position when the wafer was moved in. From cbaxter at snf.stanford.edu Wed Apr 25 06:12:59 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2001 6:12:59 PM Subject: Shutdown pquest 2001-04-25 15:39:53: Message-ID: From cbaxter at snf.stanford.edu Wed Apr 25 06:13:57 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2001 6:13:57 PM Subject: Problem pquest 2001-04-25 15:20:11: Load Lock has large leak. Jim Message-ID: no leak found, purge turn's on during wafer transfer From cbaxter at snf.stanford.edu Wed Apr 25 06:14:18 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2001 6:14:18 PM Subject: Shutdown pquest 2001-04-25 15:39:53: Message-ID: cleared From cbaxter at snf.stanford.edu Wed Apr 25 06:14:36 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2001 6:14:36 PM Subject: Problem pquest 2001-04-25 12:04:21: Message-ID: cleared From cbaxter at snf.stanford.edu Wed Apr 25 06:14:46 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2001 6:14:46 PM Subject: Problem pquest 2001-04-25 15:20:11: Load Lock has large leak. Jim Message-ID: From cbaxter at snf.stanford.edu Wed Apr 25 06:14:48 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2001 6:14:48 PM Subject: Shutdown pquest 2001-04-25 15:39:53: Message-ID: From cbaxter at snf.stanford.edu Wed Apr 25 06:14:51 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2001 6:14:51 PM Subject: Problem pquest 2001-04-25 12:04:21: Message-ID: