From booth at snf.stanford.edu  Wed Aug  1 11:14:27 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Aug 1, 2001 11:14:27 AM
Subject: Shutdown pquest 2001-07-26 10:54:09: burnbox shutdown
Message-ID: <mailman.120.1357938559.25846.pquest-pcs@snf.stanford.edu>

burnbox for Pquest is up again.
Restarted Pquest.
Ready for use.



From nbeck at snf.stanford.edu  Fri Aug 17 02:23:54 2001
From: nbeck at snf.stanford.edu (nbeck at snf.stanford.edu)
Date: Aug 17, 2001 2:23:54 PM
Subject: Shutdown pquest 2001-08-17 14:23:52: broken wafer inside
Message-ID: <mailman.121.1357938559.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Aug 17 03:18:08 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 17, 2001 3:18:08 PM
Subject: Shutdown pquest 2001-08-17 14:23:52: broken wafer inside
Message-ID: <mailman.122.1357938559.25846.pquest-pcs@snf.stanford.edu>

vented chamber and cleaned up broken wafer. wiped
down chamber.  chamber will need condtioning



From ywu at snf.stanford.edu  Fri Aug 24 12:21:31 2001
From: ywu at snf.stanford.edu (ywu at snf.stanford.edu)
Date: Aug 24, 2001 12:21:31 PM
Subject: Problem pquest 2001-08-24 12:21:29: Problem on PlasmaQuest ECR 
Message-ID: <mailman.123.1357938559.25846.pquest-pcs@snf.stanford.edu>

Hi,
I performed an oxygen cleaning and dummy GaAs etching and everything went on OK. However, after the silicon dummy wafer is unloaded, I found that an edge of the wafer is broken. Seems it is still inside the chamber somewhere. Sorry for that and please fix it.
Thanks.
ywu
408-205-5103



From hphan at snf.stanford.edu  Fri Aug 24 01:51:29 2001
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Aug 24, 2001 1:51:29 PM
Subject: Shutdown pquest 2001-08-24 13:51:28: Broken wafer inside the chamber
Message-ID: <mailman.124.1357938559.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Aug 24 03:02:47 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 24, 2001 3:02:47 PM
Subject: Shutdown pquest 2001-08-24 13:51:28: Broken wafer inside the chamber
Message-ID: <mailman.125.1357938559.25846.pquest-pcs@snf.stanford.edu>

removed broken wafer



From cbaxter at snf.stanford.edu  Fri Aug 24 03:02:56 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 24, 2001 3:02:56 PM
Subject: Problem pquest 2001-08-24 12:21:29: Problem on PlasmaQuest ECR 
Message-ID: <mailman.126.1357938559.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Aug 24 03:03:02 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 24, 2001 3:03:02 PM
Subject: Shutdown pquest 2001-08-24 13:51:28: Broken wafer inside the chamber
Message-ID: <mailman.127.1357938559.25846.pquest-pcs@snf.stanford.edu>




From rcrane at snf.stanford.edu  Sat Aug 25 07:48:23 2001
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Aug 25, 2001 7:48:23 AM
Subject: Shutdown pquest 2001-08-25 07:48:22: facility
Message-ID: <mailman.128.1357938559.25846.pquest-pcs@snf.stanford.edu>




From rcrane at snf.stanford.edu  Sat Aug 25 04:29:45 2001
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Aug 25, 2001 4:29:45 PM
Subject: Shutdown pquest 2001-08-25 07:48:22: facility
Message-ID: <mailman.129.1357938559.25846.pquest-pcs@snf.stanford.edu>

exhaust is up