From cbaxter at snf.stanford.edu Tue Feb 6 08:25:16 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 6, 2001 8:25:16 PM Subject: Shutdown pquest 2001-02-06 20:25:16: unable to access service mode to pump down chamber and ramp turbo. need password!!!!!!!!!!! Message-ID: From cbaxter at snf.stanford.edu Wed Feb 7 10:31:50 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 7, 2001 10:31:50 PM Subject: Shutdown pquest 2001-02-06 20:25:16: unable to access service mode to pump down chamber and ramp turbo. need password!!!!!!!!!!! Message-ID: Jim Mcvittie gave the password. rough down chamber and ramp up turbo From gigi at snf.stanford.edu Tue Feb 13 01:18:33 2001 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Feb 13, 2001 1:18:33 PM Subject: Problem pquest 2001-02-13 13:18:32: atmosphere sensor & ECR indicator Message-ID: the Lock atmosphere sensor does not sense when the load lock is vented. To fix the problem it is enough to open and close the lid. the "remote" indicator on the ECR panel is not working From cbaxter at snf.stanford.edu Tue Feb 13 06:24:13 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 13, 2001 6:24:13 PM Subject: Problem pquest 2001-02-13 13:18:32: atmosphere sensor & ECR indicator Message-ID: adjusted mks atm switch. load lock was atm already but mks indicator led was not above setpoint. adjusted setpoint pot till led indicator turn's on. From gigi at snf.stanford.edu Thu Feb 15 08:17:09 2001 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Feb 15, 2001 8:17:09 PM Subject: Problem pquest 2001-02-15 20:17:07: RF tuner does not work properly Message-ID: RF tuner cannot be stabilized neither automatically nor manually. From cbaxter at snf.stanford.edu Thu Feb 15 08:52:58 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 15, 2001 8:52:58 PM Subject: Problem pquest 2001-02-15 20:17:07: RF tuner does not work properly Message-ID: ran a recipe rf is tuning fine.. From aykutlu at snf.stanford.edu Sat Feb 17 03:43:00 2001 From: aykutlu at snf.stanford.edu (aykutlu at snf.stanford.edu) Date: Feb 17, 2001 3:43:00 PM Subject: Problem pquest 2001-02-17 15:42:59: Message-ID: trouble tuning RF, chamber may be dirty From booth at snf.stanford.edu Tue Feb 20 03:35:13 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 20, 2001 3:35:13 PM Subject: Problem pquest 2001-02-17 15:42:59: Message-ID: Jim McVittie tightened loose motor shaft setscrews? From vossough at snf.stanford.edu Thu Feb 22 10:10:08 2001 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Feb 22, 2001 10:10:08 PM Subject: Problem pquest 2001-02-22 22:10:07: Bias voltage indicators do not work Message-ID: From mcvittie at cis.Stanford.EDU Fri Feb 23 11:27:19 2001 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Fri, 23 Feb 2001 11:27:19 -0800 (PST) Subject: Problem pquest 2001-02-22 22:10:07: Bias voltage indicators do not work In-Reply-To: <200102230610.f1N6AGV09247@leland.Stanford.EDU> Message-ID: Vossough, I would like to look at this problem with you if you have time this (Friday) afternoon around 3:30. Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 On 22 Feb 2001 vossough at snf.stanford.edu wrote: > > From vossough at snf.stanford.edu Fri Feb 23 05:56:24 2001 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Feb 23, 2001 5:56:24 PM Subject: Shutdown pquest 2001-02-23 17:56:22: RF short in the substrate assembly Message-ID: From mcvittie at cis.Stanford.EDU Fri Feb 23 18:11:46 2001 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Fri, 23 Feb 2001 18:11:46 -0800 (PST) Subject: Rf short on PlasmaQuest Message-ID: PQ users, I wanted to let you know that the PQ system has a serious problem. It has a short in the rf path in the electode assembly. The matching ckt appears to be fine and there no obvious problem in the etch chamber. I think we are going to have to take the electrode apart to repair the problem. THe system is usable only if your process can get by with no rf to wafer, ie. you can not develop a dc bias. There is always the possibility that Len know has seen this problem before and knows of a simple fix. It is a pretty solid short and I expect it will take some effort to fix it. Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075