Rf short on PlasmaQuest

Jim McVittie mcvittie at cis.Stanford.EDU
Fri Feb 23 18:11:46 PST 2001


PQ users,

I wanted to let you know that the PQ system has a serious problem.  It has
a short in the rf path in the electode assembly. The matching ckt appears
to be fine and there no obvious problem in the etch chamber. I think we
are going to have to take the electrode apart to repair the problem. THe
system is usable only if your process can get by with no rf to wafer, ie.  
you can not develop a dc bias. There is always the possibility that Len
know has seen this problem before and knows of a simple fix. It is a
pretty solid short and I expect it will take some effort to fix it.

			Jim 	
--------------------------------------------------------------
James P. McVittie	                Senior Research Scientist
Allen Center for Integrated Systems     jmcvittie at stanford.edu
Stanford University             	Tel: (650) 725-3640	
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075	





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