From booth at snf.stanford.edu Mon Jun 4 12:46:08 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 4, 2001 12:46:08 PM Subject: Shutdown pquest 2001-06-04 12:46:06: Shutdown for cleaning Message-ID: while starting to clean chamber, I found that the quartz gas injector ring is eroded and broken. Need new quartz. From cbaxter at snf.stanford.edu Thu Jun 7 05:52:34 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 7, 2001 5:52:34 PM Subject: Shutdown pquest 2001-06-04 12:46:06: Shutdown for cleaning Message-ID: installed used quartz. check wafer handling no problem encountered. chamber ready for conditioning From jwynn at snf.stanford.edu Mon Jun 11 07:44:43 2001 From: jwynn at snf.stanford.edu (jwynn at snf.stanford.edu) Date: Jun 11, 2001 7:44:43 PM Subject: Problem pquest 2001-06-11 19:44:41: O-ring partway off Message-ID: When extracting a wafer (2nd time on a blank wafer) it pulled the o-ring halfway off. This is the o-ring that the wafer clamps too. The wafer is on the loading arm. Janice Wynn From cbaxter at snf.stanford.edu Mon Jun 11 09:00:16 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 11, 2001 9:00:16 PM Subject: Problem pquest 2001-06-11 19:44:41: O-ring partway off Message-ID: vented chamber and removed wafer. reseated chuck oring From gigi at snf.stanford.edu Wed Jun 13 11:47:07 2001 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Jun 13, 2001 11:47:07 AM Subject: Shutdown pquest 2001-06-13 11:47:06: wafer broken inside Message-ID: the carrier wafer brooke inside, with sample on it, during unloading From booth at snf.stanford.edu Wed Jun 13 01:56:52 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 13, 2001 1:56:52 PM Subject: Shutdown pquest 2001-06-13 11:47:06: wafer broken inside Message-ID: removed broken wafer pieces, & restarted system. System should pump out for several hours before next user tries to season the chamber. Len Wed @ 2 pm From jhaydon at snf.stanford.edu Thu Jun 14 01:36:57 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Jun 14, 2001 1:36:57 PM Subject: Shutdown pquest 2001-06-14 13:36:56: shut down for valve replacement on sts dep Message-ID: From jhaydon at snf.stanford.edu Thu Jun 14 04:22:27 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Jun 14, 2001 4:22:27 PM Subject: Shutdown pquest 2001-06-14 16:22:27: leak checking new valves until 06/15/01 Message-ID: From seymour at snf.stanford.edu Fri Jun 15 07:47:38 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 15, 2001 7:47:38 AM Subject: Shutdown pquest 2001-06-14 16:22:27: leak checking new valves until 06/15/01 Message-ID: methane line passed leak check. line charged with methane From seymour at snf.stanford.edu Fri Jun 15 07:48:12 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 15, 2001 7:48:12 AM Subject: Shutdown pquest 2001-06-14 13:36:56: shut down for valve replacement on sts dep Message-ID: valve replaced and line leak checked and filled with methane From jwynn at snf.stanford.edu Thu Jun 21 11:33:59 2001 From: jwynn at snf.stanford.edu (jwynn at snf.stanford.edu) Date: Jun 21, 2001 11:33:59 AM Subject: Problem pquest 2001-06-21 11:33:57: clamp down sensor failure Message-ID: After loading the wafer, the load arm retracts as usual and the clamp comes down. However, then the pquest gets stuck saying "Waiting for the Clamp Down Sensor" (for 8+ minutes before I aborted). I hit esc and tried it 3 times total, cleaning the wafer before the 3rd run. I did one run first that did work before this problem started. Janice Wynn From cbaxter at snf.stanford.edu Thu Jun 21 05:08:34 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 21, 2001 5:08:34 PM Subject: Problem pquest 2001-06-21 11:33:57: clamp down sensor failure Message-ID: adjusted clamp down sensor and cycled wafer.. From jwynn at snf.stanford.edu Fri Jun 22 06:11:50 2001 From: jwynn at snf.stanford.edu (jwynn at snf.stanford.edu) Date: Jun 22, 2001 6:11:50 PM Subject: Problem pquest 2001-06-22 18:11:48: clamp sensor and thermometer problems Message-ID: The clamp sensor started malfunctioning again today after I did several runs. Using Gigi's suggestion of gently pushing on the lever to get it to sense it allowed me to still run further samples. The thermometer is still misbehaving. The cooling water was stable at 20C. The computer monitor displayed the temperature fine until the step in my process where the RF and microwave power came on. Then it shot down and read 0.3C or something similar. The red LED temperature display read some ridiculous value. On long runs (> 1 min) the thermometer reading recovered. Janice Wynn From cbaxter at snf.stanford.edu Mon Jun 25 05:03:11 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 25, 2001 5:03:11 PM Subject: Problem pquest 2001-06-22 18:11:48: clamp sensor and thermometer problems Message-ID: checked tool. could not duplicate error