Problem pquest 2001-06-11 19:44:41: O-ring partway off

jwynn at snf.stanford.edu jwynn at snf.stanford.edu
Mon Jun 11 07:44:43 PDT 2001


When extracting a wafer (2nd time on a blank wafer) it pulled the o-ring halfway off.  This is the o-ring that the wafer clamps too.  The wafer is on the loading arm.
Janice Wynn




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