Problem pquest 2001-06-11 19:44:41: O-ring partway off
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Jun 11 09:00:16 PDT 2001
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Problem pquest 2001-06-11 19:44:41: O-ring partway off
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Shutdown pquest 2001-06-13 11:47:06: wafer broken inside
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vented chamber and removed wafer. reseated chuck oring
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Problem pquest 2001-06-11 19:44:41: O-ring partway off
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Shutdown pquest 2001-06-13 11:47:06: wafer broken inside
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