Shutdown pquest 2001-06-13 11:47:06: wafer broken inside

booth at snf.stanford.edu booth at snf.stanford.edu
Wed Jun 13 01:56:52 PDT 2001


removed broken wafer pieces, & restarted system.
System should pump out for several hours before
next user tries to season the chamber.
	Len	Wed @ 2 pm




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