Problem pquest 2001-06-21 11:33:57: clamp down sensor failure

jwynn at snf.stanford.edu jwynn at snf.stanford.edu
Thu Jun 21 11:33:59 PDT 2001


After loading the wafer, the load arm retracts as usual and the clamp comes down.  However, then the pquest gets stuck saying "Waiting for the Clamp Down Sensor" (for 8+ minutes before I aborted).  I hit esc and tried it 3 times total, cleaning the wafer before the 3rd run.  I did one run first that did work before this problem started. 
Janice Wynn




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