From cbaxter at snf.stanford.edu Mon Mar 5 11:41:28 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 5, 2001 11:41:28 PM Subject: Shutdown pquest 2001-02-23 17:56:22: RF short in the substrate assembly Message-ID: changed melted shrink tubing and installed lower electrode back . align wafer transfer. chamber will to bo condition before ranning any recipe.. From cbaxter at snf.stanford.edu Mon Mar 5 11:41:54 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 5, 2001 11:41:54 PM Subject: Problem pquest 2001-02-22 22:10:07: Bias voltage indicators do not work Message-ID: repiar short on cathode.. From gigi at snf.stanford.edu Tue Mar 6 09:19:38 2001 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Mar 6, 2001 9:19:38 AM Subject: Problem pquest 2001-03-06 09:19:35: clamp down sensor not sensing Message-ID: The clamp down sensor does not sense "clamp down position". Moreover the backside He flow is 8.8 instead of 4.3 and the process stops because of the tolerance check. Maybe the two problems are related (wafer not clamped correctly, even if it seems so). From cbaxter at snf.stanford.edu Tue Mar 6 05:54:58 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 6, 2001 5:54:58 PM Subject: Problem pquest 2001-03-06 09:19:35: clamp down sensor not sensing Message-ID: adjusted clamp force at atm and under vacuum. transfer wafer at atm and under vacuum . clamp sensor is made From booth at snf.stanford.edu Wed Mar 7 10:58:56 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 7, 2001 10:58:56 AM Subject: Shutdown pquest 2001-03-07 10:58:56: troubleshooting backside Helilum leakage. Message-ID: From booth at snf.stanford.edu Wed Mar 7 03:46:38 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 7, 2001 3:46:38 PM Subject: Shutdown pquest 2001-03-07 10:58:56: troubleshooting backside Helilum leakage. Message-ID: Helium flow rate is ~8 sccm @ 10 Torr. Gigi modified his recipe - entered 9999 value for tolerance checking, and recipe did not fault. From cbaxter at snf.stanford.edu Wed Mar 7 08:19:04 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 7, 2001 8:19:04 PM Subject: Comment pquest 2001-03-07 20:19:04: backside He flow... Message-ID: changed all 4 spring and it help,He leak drop from 8.1sccm to 7.4sccm. but still all of spec. adjusted set screw on lifter assy. down to give it more pressure on clamping. load a wafer into chamber and manually turn on He pressure to 10 torr . He leak drop to 3.4sccm. repeated sequence a couple of time and He leak it between 3.6 to 4.1 From vossough at snf.stanford.edu Sun Mar 11 07:54:26 2001 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Mar 11, 2001 7:54:26 PM Subject: Problem pquest 2001-03-11 19:54:24: A piece of broken wafer on the chuck Message-ID: The edge of my wafer broke during clamping (apparently because of the clamping force). The wafer was retrieved by the arm, but a small piece fell on the chuck. From booth at snf.stanford.edu Mon Mar 12 06:58:02 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 12, 2001 6:58:02 AM Subject: Shutdown pquest 2001-03-12 06:58:01: broken wafer Message-ID: Vossough had a wafer break & did not use CORAL to put a shutdown on the machine. From booth at snf.stanford.edu Mon Mar 12 06:58:29 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 12, 2001 6:58:29 AM Subject: Problem pquest 2001-03-11 19:54:24: A piece of broken wafer on the chuck Message-ID: should have been a shutdown. From booth at snf.stanford.edu Mon Mar 12 10:16:36 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 12, 2001 10:16:36 AM Subject: Shutdown pquest 2001-03-12 06:58:01: broken wafer Message-ID: vented system & removed broken wafer piece. Did not see any reason for breakage. From booth at snf.stanford.edu Mon Mar 12 11:46:21 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 12, 2001 11:46:21 AM Subject: Shutdown pquest 2001-03-12 11:46:20: wafer piece lost in etch chamber Message-ID: carrier wafer did not load correctly, & sample fell off of the carrier. From cbaxter at snf.stanford.edu Mon Mar 12 06:30:13 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 12, 2001 6:30:13 PM Subject: Shutdown pquest 2001-03-12 11:46:20: wafer piece lost in etch chamber Message-ID: vented chamber removed piece of broke wafer chip. bent the teflon lifter pin in so it will pick the wafer on the slot of the teflon pin. cycled wafer at atm and vacuum to make wafer is seating right on chuck . backside He leak is 4.5sccm.. From booth at snf.stanford.edu Wed Mar 14 10:33:07 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 14, 2001 10:33:07 AM Subject: Shutdown pquest 2001-03-14 10:33:06: Etch Chamber base pressure 3mT Message-ID: checking for leak. From cbaxter at snf.stanford.edu Wed Mar 14 04:56:02 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 14, 2001 4:56:02 PM Subject: Shutdown pquest 2001-03-14 10:33:06: Etch Chamber base pressure 3mT Message-ID: found chiller @10c also fyi, i adjusted the chamber pressure manometer gauge from -2m/t to 0m/t. baratron could be drifting From cbaxter at snf.stanford.edu Wed Mar 14 04:57:39 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 14, 2001 4:57:39 PM Subject: Shutdown pquest 2001-03-14 10:33:06: Etch Chamber base pressure 3mT Message-ID: From cbaxter at snf.stanford.edu Wed Mar 14 04:58:18 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 14, 2001 4:58:18 PM Subject: Shutdown pquest 2001-03-14 10:33:06: Etch Chamber base pressure 3mT Message-ID: From cbaxter at snf.stanford.edu Wed Mar 14 07:26:29 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 14, 2001 7:26:29 PM Subject: Shutdown pquest 2001-03-14 19:26:27: found leak on clamp mechanism... Message-ID: by manually toggling clamp from release position to clamp position and thottle valve on close position. the pressure on chamber rise from .3m/t to 5m/t with in 5sec... will need to figure out on how to remove clamp assy. From cbaxter at snf.stanford.edu Wed Mar 14 07:26:37 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 14, 2001 7:26:37 PM Subject: Shutdown pquest 2001-03-14 19:26:36: Message-ID: From cbaxter at snf.stanford.edu Wed Mar 14 07:27:36 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 14, 2001 7:27:36 PM Subject: Shutdown pquest 2001-03-14 19:27:35: Message-ID: From booth at snf.stanford.edu Thu Mar 15 07:07:45 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 15, 2001 7:07:45 AM Subject: Shutdown pquest 2001-03-14 19:27:35: Message-ID: From booth at snf.stanford.edu Thu Mar 15 07:07:58 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 15, 2001 7:07:58 AM Subject: Shutdown pquest 2001-03-14 19:26:36: Message-ID: From booth at snf.stanford.edu Thu Mar 15 08:28:38 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 15, 2001 8:28:38 AM Subject: Shutdown pquest 2001-03-15 08:28:37: vacuum feedthrough leaks Message-ID: From cbaxter at snf.stanford.edu Thu Mar 15 06:31:44 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 15, 2001 6:31:44 PM Subject: Shutdown pquest 2001-03-15 18:31:43: Message-ID: From cbaxter at snf.stanford.edu Tue Mar 20 08:58:52 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 20, 2001 8:58:52 PM Subject: Shutdown pquest 2001-03-15 18:31:43: Message-ID: From cbaxter at snf.stanford.edu Tue Mar 20 08:59:03 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 20, 2001 8:59:03 PM Subject: Shutdown pquest 2001-03-15 08:28:37: vacuum feedthrough leaks Message-ID: From cbaxter at snf.stanford.edu Tue Mar 20 09:00:51 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 20, 2001 9:00:51 PM Subject: Shutdown pquest 2001-03-14 19:26:27: found leak on clamp mechanism... Message-ID: installed new ferofluidic feedthru and set clamp. leak rate is 1.1m/t per minute and backside He is @3.5sccm ..chamber need condtitioning From gigi at snf.stanford.edu Wed Mar 21 04:19:30 2001 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Mar 21, 2001 4:19:30 PM Subject: Problem pquest 2001-03-21 16:19:28: clamp down sensor not well calibrated Message-ID: clamp down sensor does not sense well the down position. It just need a slight adjustment From cbaxter at snf.stanford.edu Wed Mar 21 08:32:10 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 21, 2001 8:32:10 PM Subject: Problem pquest 2001-03-21 16:19:28: clamp down sensor not well calibrated Message-ID: adjusted clamp down sensor.. From ssinha at snf.stanford.edu Thu Mar 22 12:51:37 2001 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Mar 22, 2001 12:51:37 PM Subject: Problem pquest 2001-03-22 12:51:36: Message-ID: Loadlock will not vent to atmosphere! I cannot load samples. Please look into the problem. Thanks From cbaxter at snf.stanford.edu Thu Mar 22 05:08:18 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 22, 2001 5:08:18 PM Subject: Problem pquest 2001-03-22 12:51:36: Message-ID: atm is working fine... From pelton at snf.stanford.edu Mon Mar 26 12:56:22 2001 From: pelton at snf.stanford.edu (pelton at snf.stanford.edu) Date: Mar 26, 2001 12:56:22 AM Subject: Shutdown pquest 2001-03-26 00:56:21: Wafer broke in chamber Message-ID: A piece of the public carrier wafer broke on the chuck. The wafer is unloaded, but a piece of it is still in the chamber. Somebody will have to make a new public carrier wafer... From cbaxter at snf.stanford.edu Tue Mar 27 06:37:08 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 27, 2001 6:37:08 PM Subject: Shutdown pquest 2001-03-26 00:56:21: Wafer broke in chamber Message-ID: removed wafer chip and wet cleaned chamber. From ssinha at snf.stanford.edu Wed Mar 28 03:15:51 2001 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Mar 28, 2001 3:15:51 PM Subject: Problem pquest 2001-03-28 15:15:49: Message-ID: Public wafer carrier found cracked after removing from chamber. A small piece is possibly stuck in clamp assembly. Please check! Thanks From cbaxter at snf.stanford.edu Wed Mar 28 05:22:46 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 28, 2001 5:22:46 PM Subject: Problem pquest 2001-03-28 15:15:49: broken chip removed and adjusted clamping force Message-ID: From vossough at snf.stanford.edu Wed Mar 28 09:23:20 2001 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Mar 28, 2001 9:23:20 PM Subject: Shutdown pquest 2001-03-28 21:23:19: Does not load wafer Message-ID: Teflon pins and the robot arm are out of alignment. From cbaxter at snf.stanford.edu Wed Mar 28 09:49:37 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 28, 2001 9:49:37 PM Subject: Shutdown pquest 2001-03-28 21:23:19: Does not load wafer Message-ID: wafer was being detected on load lock for it load inside the chamber