Shutdown pquest 2001-02-23 17:56:22: RF short in the substrate assembly

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Mar 5 11:41:28 PST 2001

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changed melted shrink tubing and installed lower electrode
back . align wafer transfer. chamber will to bo condition
before ranning any recipe..

Next message: Problem pquest 2001-02-22 22:10:07: Bias voltage indicators do not work
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