Problem pquest 2001-03-06 09:19:35: clamp down sensor not sensing

gigi at snf.stanford.edu gigi at snf.stanford.edu
Tue Mar 6 09:19:38 PST 2001


The clamp down sensor does not sense "clamp down position".
Moreover the backside He flow is 8.8 instead of 4.3 and the process stops because of the tolerance check.
Maybe the two problems are related (wafer not clamped correctly, even if it seems so).




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