Problem pquest 2001-03-06 09:19:35: clamp down sensor not sensing

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Mar 6 05:54:58 PST 2001


adjusted clamp force at atm and under vacuum. transfer
wafer at atm and under vacuum . clamp sensor is made




More information about the pquest-pcs mailing list