Comment pquest 2001-03-07 20:19:04: backside He flow...

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Mar 7 08:19:04 PST 2001


changed all 4 spring and it help,He leak drop from 8.1sccm to
7.4sccm. but still all of spec. adjusted set screw on lifter
assy. down to give it more pressure on clamping. load a
wafer into chamber and manually turn on He pressure
to 10 torr . He leak drop to 3.4sccm. repeated sequence
a couple of time and He leak it between 3.6 to 4.1




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