Problem pquest 2001-03-11 19:54:24: A piece of broken wafer on the chuck

vossough at snf.stanford.edu vossough at snf.stanford.edu
Sun Mar 11 07:54:26 PST 2001


The edge of my wafer broke during clamping (apparently because of the clamping force). The wafer was retrieved by the arm, but a small piece fell on the chuck.




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