Shutdown pquest 2001-03-12 11:46:20: wafer piece lost in etch chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Mar 12 06:30:13 PST 2001


vented chamber removed piece of broke wafer chip.
bent the teflon lifter pin in so it will pick the wafer on the
slot of the teflon pin. cycled wafer at atm and vacuum
to make wafer is seating right on chuck . backside
He leak is 4.5sccm..




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