Shutdown pquest 2001-03-26 00:56:21: Wafer broke in chamber
pelton at snf.stanford.edu
pelton at snf.stanford.edu
Mon Mar 26 12:56:22 PST 2001
A piece of the public carrier wafer broke on the chuck. The
wafer is unloaded, but a piece of it is still in the chamber.
Somebody will have to make a new public carrier wafer...
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