Shutdown pquest 2001-03-26 00:56:21: Wafer broke in chamber

pelton at pelton at
Mon Mar 26 12:56:22 PST 2001

  A piece of the public carrier wafer broke on the chuck.  The
wafer is unloaded, but a piece of it is still in the chamber.
  Somebody will have to make a new public carrier wafer...

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