Problem pquest 2001-03-28 15:15:49:

ssinha at snf.stanford.edu ssinha at snf.stanford.edu
Wed Mar 28 03:15:51 PST 2001

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Public wafer carrier found cracked after removing from
chamber. A small piece is possibly stuck in clamp
assembly.
Please check! Thanks

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Next message: Problem pquest 2001-03-28 15:15:49: broken chip removed and adjusted clamping force
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