Shutdown pquest 2001-03-28 21:23:19: Does not load wafer
vossough at snf.stanford.edu
vossough at snf.stanford.edu
Wed Mar 28 09:23:20 PST 2001
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Problem pquest 2001-03-28 15:15:49: broken chip removed and adjusted clamping force
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Shutdown pquest 2001-03-28 21:23:19: Does not load wafer
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Teflon pins and the robot arm are out of alignment.
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Problem pquest 2001-03-28 15:15:49: broken chip removed and adjusted clamping force
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Shutdown pquest 2001-03-28 21:23:19: Does not load wafer
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