March 2001 Archives by date

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Starting: Mon Mar 5 11:41:28 PST 2001
Ending: Wed Mar 28 09:49:37 PST 2001
Messages: 37

• Shutdown pquest 2001-02-23 17:56:22: RF short in the substrate assembly   cbaxter at snf.stanford.edu
• Problem pquest 2001-02-22 22:10:07: Bias voltage indicators do not work   cbaxter at snf.stanford.edu
• Problem pquest 2001-03-06 09:19:35: clamp down sensor not sensing   cbaxter at snf.stanford.edu
• Problem pquest 2001-03-06 09:19:35: clamp down sensor not sensing   gigi at snf.stanford.edu
• Shutdown pquest 2001-03-07 10:58:56: troubleshooting backside Helilum leakage.   booth at snf.stanford.edu
• Comment pquest 2001-03-07 20:19:04: backside He flow...   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-07 10:58:56: troubleshooting backside Helilum leakage.   booth at snf.stanford.edu
• Problem pquest 2001-03-11 19:54:24: A piece of broken wafer on the chuck   vossough at snf.stanford.edu
• Shutdown pquest 2001-03-12 11:46:20: wafer piece lost in etch chamber   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-12 06:58:01: broken wafer   booth at snf.stanford.edu
• Problem pquest 2001-03-11 19:54:24: A piece of broken wafer on the chuck   booth at snf.stanford.edu
• Shutdown pquest 2001-03-12 06:58:01: broken wafer   booth at snf.stanford.edu
• Shutdown pquest 2001-03-12 11:46:20: wafer piece lost in etch chamber   booth at snf.stanford.edu
• Shutdown pquest 2001-03-14 10:33:06: Etch Chamber base pressure 3mT   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-14 10:33:06: Etch Chamber base pressure 3mT   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-14 10:33:06: Etch Chamber base pressure 3mT   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-14 19:26:27: found leak on clamp mechanism...   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-14 19:26:36:   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-14 19:27:35:   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-14 10:33:06: Etch Chamber base pressure 3mT   booth at snf.stanford.edu
• Shutdown pquest 2001-03-15 18:31:43:   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-14 19:27:35:   booth at snf.stanford.edu
• Shutdown pquest 2001-03-14 19:26:36:   booth at snf.stanford.edu
• Shutdown pquest 2001-03-15 08:28:37: vacuum feedthrough leaks   booth at snf.stanford.edu
• Shutdown pquest 2001-03-15 18:31:43:   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-15 08:28:37: vacuum feedthrough leaks   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-14 19:26:27: found leak on clamp mechanism...   cbaxter at snf.stanford.edu
• Problem pquest 2001-03-21 16:19:28: clamp down sensor not well calibrated   gigi at snf.stanford.edu
• Problem pquest 2001-03-21 16:19:28: clamp down sensor not well calibrated   cbaxter at snf.stanford.edu
• Problem pquest 2001-03-22 12:51:36:   cbaxter at snf.stanford.edu
• Problem pquest 2001-03-22 12:51:36:   ssinha at snf.stanford.edu
• Shutdown pquest 2001-03-26 00:56:21: Wafer broke in chamber   pelton at snf.stanford.edu
• Shutdown pquest 2001-03-26 00:56:21: Wafer broke in chamber   cbaxter at snf.stanford.edu
• Problem pquest 2001-03-28 15:15:49:   ssinha at snf.stanford.edu
• Problem pquest 2001-03-28 15:15:49: broken chip removed and adjusted clamping force   cbaxter at snf.stanford.edu
• Shutdown pquest 2001-03-28 21:23:19: Does not load wafer   vossough at snf.stanford.edu
• Shutdown pquest 2001-03-28 21:23:19: Does not load wafer   cbaxter at snf.stanford.edu

Last message date: Wed Mar 28 09:49:37 PST 2001
Archived on: Fri Jan 11 13:09:38 PST 2013

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