Problem pquest 2001-11-07 11:30:37: waiting for clamp sensor error

booth at snf.stanford.edu booth at snf.stanford.edu
Wed Nov 7 11:53:09 PST 2001


System had tried to clamp wafer, but was waiting
until the down sensor was made.
Put system in manual & commanded clamp
up then down & system recognized down sensor
normally.  Put system back in run mode, & Randy
True continued processing.




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