Problem pquest 2001-11-10 16:35:17: BCl3 flow

ssinha at ssinha at
Sat Nov 10 04:35:19 PST 2001

The BCl3 flow meter was indicating 40+sccm  !  It was set for
10 sccm. The etch was therefore terminated. I am reporting
as a problem and not a shut down.

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