Problem pquest 2001-11-10 16:35:17: BCl3 flow

ssinha at snf.stanford.edu ssinha at snf.stanford.edu
Sat Nov 10 04:35:19 PST 2001


The BCl3 flow meter was indicating 40+sccm  !  It was set for
10 sccm. The etch was therefore terminated. I am reporting
as a problem and not a shut down.




More information about the pquest-pcs mailing list