From booth at snf.stanford.edu Mon Apr 1 11:18:38 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 1, 2002 11:18:38 AM Subject: Problem pquest 2002-03-31 16:54:04: Message-ID: From booth at snf.stanford.edu Mon Apr 1 11:18:48 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 1, 2002 11:18:48 AM Subject: Problem pquest 2002-03-31 16:40:47: no etch Message-ID: From booth at snf.stanford.edu Mon Apr 1 11:19:01 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 1, 2002 11:19:01 AM Subject: Problem pquest 2002-03-31 16:31:11: plasma problem Message-ID: From booth at snf.stanford.edu Mon Apr 1 11:19:41 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 1, 2002 11:19:41 AM Subject: Shutdown pquest 2002-04-01 11:19:41: system will not pump down Message-ID: From booth at snf.stanford.edu Mon Apr 1 02:33:44 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 1, 2002 2:33:44 PM Subject: Shutdown pquest 2002-04-01 11:19:41: system will not pump down Message-ID: Restarted system, verified base pressure, put in standby. From true at snf.stanford.edu Mon Apr 8 11:04:08 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Apr 8, 2002 11:04:08 PM Subject: Shutdown pquest 2002-04-08 23:04:07: wafer disappeared Message-ID: my wafer went in, etched, and didn't come out. I don't see it thru the windows so maybe it fell or maybe it broke. From cbaxter at snf.stanford.edu Tue Apr 9 09:23:41 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 9, 2002 9:23:41 PM Subject: Shutdown pquest 2002-04-08 23:04:07: wafer disappeared Message-ID: wafer was recover by Len. I wet cleaned the chambe and align lifter teflon pins From true at snf.stanford.edu Wed Apr 10 11:23:39 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Apr 10, 2002 11:23:39 AM Subject: Problem pquest 2002-04-10 11:23:37: system configuration not right Message-ID: Several times in the last month, when I have come up to use the tool, it has been in an imporoper state. I hit the start button, load my wafer, the load lock pumps down, then etching starts (without transfering the wafer to the chuck). From true at snf.stanford.edu Wed Apr 10 11:23:55 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Apr 10, 2002 11:23:55 AM Subject: Shutdown pquest 2002-04-10 11:23:54: see previous problem Message-ID: From hphan at snf.stanford.edu Thu Apr 11 12:15:46 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Apr 11, 2002 12:15:46 PM Subject: Shutdown pquest 2002-04-10 11:23:54: Dummy Problem Message-ID: Please make sure the wafer sensor's led is on when place a wafer on the arm. From hphan at snf.stanford.edu Thu Apr 11 12:16:13 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Apr 11, 2002 12:16:13 PM Subject: Problem pquest 2002-04-10 11:23:37: Fixed Message-ID: From dongyi at snf.stanford.edu Tue Apr 16 05:27:34 2002 From: dongyi at snf.stanford.edu (dongyi at snf.stanford.edu) Date: Apr 16, 2002 5:27:34 PM Subject: Problem pquest 2002-04-16 17:27:31: RF no stable Message-ID: When I was using the pquest ECR, I can not got stable RF reflect power. Please check as sure no problem. Thanks Dongyi From cbaxter at snf.stanford.edu Tue Apr 16 05:37:50 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 16, 2002 5:37:50 PM Subject: Problem pquest 2002-04-16 17:27:31: RF no stable Message-ID: was able to tune rf From dweaver at snf.stanford.edu Fri Apr 26 06:49:37 2002 From: dweaver at snf.stanford.edu (dweaver at snf.stanford.edu) Date: Apr 26, 2002 6:49:37 PM Subject: Shutdown pquest 2002-04-26 18:49:37: wafer fell off clamp Message-ID: It looked like the tool loaded ok but when the wafer was to be removed it fell off the pins. There are two pieces of wafer plus the wafer carrier in the chamber. my number 408-474-3381 if there are questions From cbaxter at snf.stanford.edu Fri Apr 26 07:58:34 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 26, 2002 7:58:34 PM Subject: Shutdown pquest 2002-04-26 18:49:37: wafer fell off clamp Message-ID: wafer carrier was too thin already, it broke during clamping. removed wafer chips and wipe down chamber From sabnis at snf.stanford.edu Sun Apr 28 08:00:53 2002 From: sabnis at snf.stanford.edu (sabnis at snf.stanford.edu) Date: Apr 28, 2002 8:00:53 PM Subject: Problem pquest 2002-04-28 20:00:52: Use pquest with caution Message-ID: We did several etches today and noticed a few problems. (1) The wafer pin closest to drytek2 is bent and partially damaged. Wafer-loading crashing problems are imminent. I suggest that the pin be replaced as soon as possible. (2) The VAT adaptive pressure control system has difficulty stabilizing the chamber pressure from time to time. When this occurs, appropriate microwave tuning is difficult to achieve. (3) The methane (CH4) flow dwindled to zero in the middle of our last etch for unknown reasons. From booth at snf.stanford.edu Mon Apr 29 07:15:02 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 29, 2002 7:15:02 AM Subject: Shutdown pquest 2002-04-29 07:15:02: Wafer lift pin is damaged. Message-ID: Unsafe to run with damaged wafer lift pin. From booth at snf.stanford.edu Mon Apr 29 07:15:33 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 29, 2002 7:15:33 AM Subject: Problem pquest 2002-04-28 20:00:52: Use pquest with caution Message-ID: replaced with shutdown report.