Problem pquest 2002-04-10 11:23:37: system configuration not right

true at snf.stanford.edu true at snf.stanford.edu
Wed Apr 10 11:23:39 PDT 2002


Several times in the last month, when I have come up to use the tool, it has been in an imporoper state. I hit the start button, load my wafer, the load lock pumps down, then etching starts (without transfering the wafer to the chuck).




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