Shutdown pquest 2002-04-26 18:49:37: wafer fell off clamp

dweaver at snf.stanford.edu dweaver at snf.stanford.edu
Fri Apr 26 06:49:37 PDT 2002


It looked like the tool loaded ok but when the wafer was to be removed it fell off the pins.  There are two pieces of wafer plus the wafer carrier in the chamber.  my number 408-474-3381 if there are questions




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