Problem pquest 2002-04-28 20:00:52: Use pquest with caution

sabnis at snf.stanford.edu sabnis at snf.stanford.edu
Sun Apr 28 08:00:53 PDT 2002


We did several etches today and noticed a few problems.
(1)  The wafer pin closest to drytek2 is bent and partially 
damaged.  Wafer-loading crashing problems are imminent.  
I suggest that the pin be replaced as soon as possible.
(2)  The VAT adaptive pressure control system has difficulty stabilizing the chamber pressure from time to time.  When this 
occurs, appropriate microwave tuning is difficult to achieve.
(3) The methane (CH4) flow dwindled to zero in the middle of
our last etch for unknown reasons.




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