Shutdown pquest 2002-04-29 07:15:02: Wafer lift pin is damaged.
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Apr 29 07:15:02 PDT 2002
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Unsafe to run with damaged wafer lift pin.
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Problem pquest 2002-04-28 20:00:52: Use pquest with caution
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