April 2002 Archives by thread

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Starting: Mon Apr 1 02:33:44 PST 2002
Ending: Mon Apr 29 07:15:33 PDT 2002
Messages: 18

• Problem pquest 2002-03-31 16:54:04:   booth at snf.stanford.edu
• Problem pquest 2002-03-31 16:40:47: no etch   booth at snf.stanford.edu
• Problem pquest 2002-03-31 16:31:11: plasma problem   booth at snf.stanford.edu
• Shutdown pquest 2002-04-01 11:19:41: system will not pump down   booth at snf.stanford.edu
  • Shutdown pquest 2002-04-01 11:19:41: system will not pump down   booth at snf.stanford.edu
• Shutdown pquest 2002-04-08 23:04:07: wafer disappeared   true at snf.stanford.edu
  • Shutdown pquest 2002-04-08 23:04:07: wafer disappeared   cbaxter at snf.stanford.edu
• Problem pquest 2002-04-10 11:23:37: system configuration not right   true at snf.stanford.edu
• Shutdown pquest 2002-04-10 11:23:54: see previous problem   true at snf.stanford.edu
• Shutdown pquest 2002-04-10 11:23:54: Dummy Problem   hphan at snf.stanford.edu
• Problem pquest 2002-04-10 11:23:37: Fixed   hphan at snf.stanford.edu
• Problem pquest 2002-04-16 17:27:31: RF no stable   dongyi at snf.stanford.edu
  • Problem pquest 2002-04-16 17:27:31: RF no stable   cbaxter at snf.stanford.edu
• Shutdown pquest 2002-04-26 18:49:37: wafer fell off clamp   dweaver at snf.stanford.edu
  • Shutdown pquest 2002-04-26 18:49:37: wafer fell off clamp   cbaxter at snf.stanford.edu
• Problem pquest 2002-04-28 20:00:52: Use pquest with caution   sabnis at snf.stanford.edu
  • Problem pquest 2002-04-28 20:00:52: Use pquest with caution   booth at snf.stanford.edu
• Shutdown pquest 2002-04-29 07:15:02: Wafer lift pin is damaged.   booth at snf.stanford.edu

Last message date: Mon Apr 29 07:15:33 PDT 2002
Archived on: Fri Jan 11 13:09:40 PST 2013

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