From gigi at snf.stanford.edu  Tue Aug 27 03:57:48 2002
From: gigi at snf.stanford.edu (gigi at snf.stanford.edu)
Date: Aug 27, 2002 3:57:48 PM
Subject: Shutdown pquest 2002-08-27 15:57:47: 
Message-ID: <mailman.220.1357938560.25846.pquest-pcs@snf.stanford.edu>

I tried to load but one of the pins seems not to work: the carrier drops back to the load arm and comes back with the arm. NO WAFER is broken in the chamber, but it is risky to load and wafers may break.



From cbaxter at snf.stanford.edu  Tue Aug 27 07:06:50 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 27, 2002 7:06:50 PM
Subject: Comment pquest 2002-08-27 19:06:49: vesple pin 7 oclock is broken in half.  
Message-ID: <mailman.221.1357938560.25846.pquest-pcs@snf.stanford.edu>