Shutdown pquest 2002-08-27 15:57:47:

gigi at snf.stanford.edu gigi at snf.stanford.edu
Tue Aug 27 03:57:48 PDT 2002


I tried to load but one of the pins seems not to work: the carrier drops back to the load arm and comes back with the arm. NO WAFER is broken in the chamber, but it is risky to load and wafers may break.




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