From cbaxter at snf.stanford.edu Tue Dec 10 04:40:14 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 10, 2002 4:40:14 PM Subject: Shutdown pquest 2002-11-30 19:33:50: burn box failure Message-ID: burn box is up and running From cbaxter at snf.stanford.edu Fri Dec 13 04:06:35 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 13, 2002 4:06:35 PM Subject: Shutdown pquest 2002-12-13 16:06:34: shutdown for wet clean Message-ID: From cbaxter at snf.stanford.edu Fri Dec 13 06:31:47 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 13, 2002 6:31:47 PM Subject: Shutdown pquest 2002-12-13 16:06:34: shutdown for wet clean Message-ID: completed chamber wet clean From ethrush at snf.stanford.edu Tue Dec 17 09:25:03 2002 From: ethrush at snf.stanford.edu (ethrush at snf.stanford.edu) Date: Dec 17, 2002 9:25:03 AM Subject: Shutdown pquest 2002-12-17 09:25:00: problem with pin Message-ID: From cbaxter at snf.stanford.edu Tue Dec 17 07:00:24 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 17, 2002 7:00:24 PM Subject: Shutdown pquest 2002-12-17 09:25:00: problem with pin Message-ID: removed and re-align pin, also found broken wafer inside the chamber. From cmfaulkn at snf.stanford.edu Wed Dec 18 02:37:06 2002 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Dec 18, 2002 2:37:06 PM Subject: Problem pquest 2002-12-18 14:37:05: not sensing clamp down Message-ID: Failed to sense clamp down on first loading of the wafer. I hit ESC, unloaded the wafer and tried again successfully. From cbaxter at snf.stanford.edu Wed Dec 18 04:36:07 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 18, 2002 4:36:07 PM Subject: Problem pquest 2002-12-18 14:37:05: not sensing clamp down Message-ID: adjusted clamp sensor and varified backside he.