From cbaxter at snf.stanford.edu  Wed Feb  6 10:59:14 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Feb 6, 2002 10:59:14 PM
Subject: Shutdown pquest 2002-02-06 22:59:13: shutdown tool per John Shott, intermitten cl2 alarm.
Message-ID: <mailman.157.1357938560.25846.pquest-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Mon Feb 11 07:22:26 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Feb 11, 2002 7:22:26 AM
Subject: Shutdown pquest 2002-02-06 22:59:13: shutdown tool per John Shott, intermitten cl2 alarm.
Message-ID: <mailman.158.1357938560.25846.pquest-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Mon Feb 11 03:07:07 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Feb 11, 2002 3:07:07 PM
Subject: Shutdown pquest 2002-02-11 15:07:06: CL2 alarm problem, Do not use
Message-ID: <mailman.159.1357938560.25846.pquest-pcs@snf.stanford.edu>




From rcrane at snf.stanford.edu  Tue Feb 12 10:13:39 2002
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Feb 12, 2002 10:13:39 AM
Subject: Shutdown pquest 2002-02-11 15:07:06: CL2 alarm problem, Do not use
Message-ID: <mailman.160.1357938560.25846.pquest-pcs@snf.stanford.edu>

OK for use without CL2



From rcrane at snf.stanford.edu  Tue Feb 12 10:15:37 2002
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Feb 12, 2002 10:15:37 AM
Subject: Problem pquest 2002-02-12 10:15:36: Cl2 not available, OK for other gases
Message-ID: <mailman.161.1357938560.25846.pquest-pcs@snf.stanford.edu>

The Cl2 gas supply has been secured until the gas alarm problem can be resolved. OK to use tool with other gases.



From volkan at snf.stanford.edu  Tue Feb 12 02:12:47 2002
From: volkan at snf.stanford.edu (volkan at snf.stanford.edu)
Date: Feb 12, 2002 2:12:47 PM
Subject: Shutdown pquest 2002-02-12 14:12:46: pquest shut down. 
Message-ID: <mailman.162.1357938560.25846.pquest-pcs@snf.stanford.edu>

Wafer is misloaded and currently stuck in the machine: Pins
did not raise all the way up; the arm moved the wafer, and the 
wafer is now misloaded. Teflon pins may need to be adjusted.
(The machines was shut down at 45C before reaching the
set temp.)



From cbaxter at snf.stanford.edu  Tue Feb 12 05:42:44 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Feb 12, 2002 5:42:44 PM
Subject: Shutdown pquest 2002-02-12 14:12:46: pquest shut down. 
Message-ID: <mailman.163.1357938560.25846.pquest-pcs@snf.stanford.edu>

removed wafer on chamber and adjusted clamp lift position



From rcrane at snf.stanford.edu  Thu Feb 14 02:10:20 2002
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Feb 14, 2002 2:10:20 PM
Subject: Problem pquest 2002-02-12 10:15:36: Cl2 not available, OK for other gases
Message-ID: <mailman.164.1357938560.25846.pquest-pcs@snf.stanford.edu>

Cl2 alarm circuit has been repaired