Shutdown pquest 2002-02-12 14:12:46: pquest shut down.

volkan at snf.stanford.edu volkan at snf.stanford.edu
Tue Feb 12 02:12:47 PST 2002


Wafer is misloaded and currently stuck in the machine: Pins
did not raise all the way up; the arm moved the wafer, and the 
wafer is now misloaded. Teflon pins may need to be adjusted.
(The machines was shut down at 45C before reaching the
set temp.)




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