From ssinha at snf.stanford.edu Thu Jan 17 04:47:38 2002 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Jan 17, 2002 4:47:38 PM Subject: Comment pquest 2002-01-17 16:47:38: flowrates Message-ID: Chlorine and helium backside flowrates not correct! From ssinha at snf.stanford.edu Sun Jan 27 10:13:24 2002 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Jan 27, 2002 10:13:24 AM Subject: Problem pquest 2002-01-27 10:13:23: Message-ID: Silicon wafer carrier and 6 samples stuck in main chamber! From ssinha at snf.stanford.edu Sun Jan 27 10:14:11 2002 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Jan 27, 2002 10:14:11 AM Subject: Shutdown pquest 2002-01-27 10:14:09: Message-ID: Silicon wafer carrier and 6 samples stuck in main chamber! From hphan at snf.stanford.edu Mon Jan 28 02:24:06 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 28, 2002 2:24:06 PM Subject: Shutdown pquest 2002-01-27 10:14:09: Message-ID: From hphan at snf.stanford.edu Mon Jan 28 02:24:27 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 28, 2002 2:24:27 PM Subject: Problem pquest 2002-01-27 10:13:23: System is fine Message-ID: From cbaxter at snf.stanford.edu Mon Jan 28 04:41:08 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 28, 2002 4:41:08 PM Subject: Shutdown pquest 2002-01-28 16:41:06: wafer inside the chamber per user(sinha) Message-ID: From cbaxter at snf.stanford.edu Mon Jan 28 05:33:48 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 28, 2002 5:33:48 PM Subject: Shutdown pquest 2002-01-28 16:41:06: wafer inside the chamber per user(sinha) Message-ID: wafer carrier fell of and wafer on the carrier broke. removed broken and check wafer transport