From cbaxter at snf.stanford.edu  Tue Jul 23 07:22:54 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 23, 2002 7:22:54 PM
Subject: Shutdown pquest 2002-06-20 00:30:33: wafer misload
Message-ID: <mailman.212.1357938560.25846.pquest-pcs@snf.stanford.edu>

adjusted flag sensor on chamber b and check hnadoff
on all four chamber



From cbaxter at snf.stanford.edu  Tue Jul 23 07:23:50 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 23, 2002 7:23:50 PM
Subject: Shutdown pquest 2002-07-23 19:23:50: sorry wrong tool disregard last comment
Message-ID: <mailman.213.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Jul 24 10:34:36 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 24, 2002 10:34:36 PM
Subject: Shutdown pquest 2002-07-23 19:23:50: sorry wrong tool disregard last comment
Message-ID: <mailman.214.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Jul 24 10:37:10 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 24, 2002 10:37:10 PM
Subject: Problem pquest 2002-06-18 15:19:35: power supply problems
Message-ID: <mailman.215.1357938560.25846.pquest-pcs@snf.stanford.edu>

completed wafer transfer alignment. adjusted clamping
force. backside he leak is at 3.4sccm. ran 30 o2clean.
chamber will to be condition.



From booth at snf.stanford.edu  Fri Jul 26 01:31:36 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 26, 2002 1:31:36 PM
Subject: Problem pquest 2002-07-26 13:31:35: Strange deposition on sample
Message-ID: <mailman.216.1357938560.25846.pquest-pcs@snf.stanford.edu>

Pquest is not ready for public use yet.
Randy & Vijit did tests yesterday, & Vijits
came out with a speckled/brown deposition.
Jim McVittie is checking this out now.



From booth at snf.stanford.edu  Mon Jul 29 12:16:41 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 29, 2002 12:16:41 PM
Subject: Shutdown pquest 2002-07-29 12:16:39: need to leak check system
Message-ID: <mailman.217.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Jul 30 08:25:59 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 30, 2002 8:25:59 PM
Subject: Shutdown pquest 2002-07-29 12:16:39: need to leak check system
Message-ID: <mailman.218.1357938560.25846.pquest-pcs@snf.stanford.edu>

leak check is fine. per Jim McVittie Vijit will test the tool



From cbaxter at snf.stanford.edu  Tue Jul 30 08:26:04 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 30, 2002 8:26:04 PM
Subject: Problem pquest 2002-07-26 13:31:35: Strange deposition on sample
Message-ID: <mailman.219.1357938560.25846.pquest-pcs@snf.stanford.edu>