Problem pquest 2002-06-18 15:19:35: power supply problems

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Jul 24 10:37:10 PDT 2002


completed wafer transfer alignment. adjusted clamping
force. backside he leak is at 3.4sccm. ran 30 o2clean.
chamber will to be condition.




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