From nchen at snf.stanford.edu Sat Jun 1 03:43:25 2002 From: nchen at snf.stanford.edu (nchen at snf.stanford.edu) Date: Jun 1, 2002 3:43:25 PM Subject: Problem pquest 2002-06-01 15:43:24: RF OUT Message-ID: From booth at snf.stanford.edu Mon Jun 3 06:59:06 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 3, 2002 6:59:06 AM Subject: Shutdown pquest 2002-06-03 06:59:06: nchen says RF is out Message-ID: From hphan at snf.stanford.edu Mon Jun 3 03:22:11 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jun 3, 2002 3:22:11 PM Subject: Shutdown pquest 2002-06-03 06:59:06: Ajusted RF Generator. Message-ID: I ran one of the Nchen's process. the RF forward power is zero.I ajusted the tuning and it working fine now. From hphan at snf.stanford.edu Mon Jun 3 03:22:26 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jun 3, 2002 3:22:26 PM Subject: Problem pquest 2002-06-01 15:43:24: Fixed Message-ID: From sabnis at snf.stanford.edu Thu Jun 6 03:59:43 2002 From: sabnis at snf.stanford.edu (sabnis at snf.stanford.edu) Date: Jun 6, 2002 3:59:43 PM Subject: Shutdown pquest 2002-06-06 15:59:42: pquest shutdown Message-ID: Wafer was misloaded into machine this afternoon. From cbaxter at snf.stanford.edu Thu Jun 6 06:16:56 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 6, 2002 6:16:56 PM Subject: Shutdown pquest 2002-06-06 15:59:42: pquest shutdown Message-ID: vacuum broken pieces of wafer chips and wet clean the chamber From nchen at snf.stanford.edu Sat Jun 8 05:49:32 2002 From: nchen at snf.stanford.edu (nchen at snf.stanford.edu) Date: Jun 8, 2002 5:49:32 PM Subject: Problem pquest 2002-06-08 17:49:31: RFout problem Message-ID: when run recipe ywuinp, the RF power setting is 35W but the real value is only 24-26W and reflected is 7W, the bias is only -12--14V from -49V last time. The etching rate decreased by a factor of 7. Tolarance check will showing problem and machine will stop. It's the same for program vijid(?) since it's almost the same program. Nong From nchen at snf.stanford.edu Sun Jun 9 01:30:33 2002 From: nchen at snf.stanford.edu (nchen at snf.stanford.edu) Date: Jun 9, 2002 1:30:33 PM Subject: Comment pquest 2002-06-09 13:30:32: problem resolved by longer seasoning time Message-ID: From sabnis at snf.stanford.edu Sun Jun 9 07:39:49 2002 From: sabnis at snf.stanford.edu (sabnis at snf.stanford.edu) Date: Jun 9, 2002 7:39:49 PM Subject: Shutdown pquest 2002-06-09 19:39:48: wafer misload again Message-ID: My carrier wafer was misloaded again despite the efforts I took to make sure this would not happen. I am sorry for the inconvenience, but I believe what is happening is out of my control and not related to using either an improper wafer or improperly placing the wafer on the wafer load arm. I did not have my real sample on the wafer carrier - only the wafer carrier itself - I was about to season the chamber before running an etch on my sample. - vijit sabnis (5-2774) From cbaxter at snf.stanford.edu Mon Jun 10 07:13:00 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 10, 2002 7:13:00 PM Subject: Shutdown pquest 2002-06-09 19:39:48: wafer misload again Message-ID: vented chamber and vacuum wafer chips. Pin hieght is ok no adjustemnet needed. chamber will to be condtion From cbaxter at snf.stanford.edu Mon Jun 10 07:13:43 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 10, 2002 7:13:43 PM Subject: Problem pquest 2002-06-08 17:49:31: RFout problem Message-ID: able to tune fine on condition recipe From sabnis at snf.stanford.edu Wed Jun 12 02:33:18 2002 From: sabnis at snf.stanford.edu (sabnis at snf.stanford.edu) Date: Jun 12, 2002 2:33:18 PM Subject: Shutdown pquest 2002-06-12 14:33:17: it happened again.... Message-ID: Len and Caesar: I am sorry to report another wafer misload. As Len instructed me to do yesterday, I loaded and unloaded the wafer several times before running my process to verify that everything is okay. The error today occurred during the loading phase - as the pins went up the wafer seemed to get stuck in the groove of the wafer arm for a brief moment. It then jumped up a bit and was not loaded onto the pins properly. I managed to hit escape before the wafer broke. My sample is attached to the carrier wafer and I would very much like to retrieve it. Since Len is on vacation, I will try to find Caesar at 4pm today to get this fixed. You guys must think I am a fool since this happened three times now in recent days, but I really believe that I am not misloading the wafer on the wafer arm since I have been paying extra attention to how the wafer sits on the wafer arm. Sorry for the inconvenience. From cbaxter at snf.stanford.edu Wed Jun 12 05:14:42 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 12, 2002 5:14:42 PM Subject: Shutdown pquest 2002-06-12 14:33:17: it happened again.... Message-ID: removed wafer. instructed user when placing wafer on the arm, place the more toward the front From true at snf.stanford.edu Tue Jun 18 03:19:36 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Jun 18, 2002 3:19:36 PM Subject: Problem pquest 2002-06-18 15:19:35: power supply problems Message-ID: Zero Bias Matching Network Problems