Shutdown pquest 2002-06-06 15:59:42: pquest shutdown
sabnis at snf.stanford.edu
sabnis at snf.stanford.edu
Thu Jun 6 03:59:43 PDT 2002
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Shutdown pquest 2002-06-03 06:59:06: nchen says RF is out
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Shutdown pquest 2002-06-06 15:59:42: pquest shutdown
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Wafer was misloaded into machine this afternoon.
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Shutdown pquest 2002-06-03 06:59:06: nchen says RF is out
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Shutdown pquest 2002-06-06 15:59:42: pquest shutdown
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