Problem pquest 2002-06-08 17:49:31: RFout problem

nchen at snf.stanford.edu nchen at snf.stanford.edu
Sat Jun 8 05:49:32 PDT 2002


when run recipe ywuinp, the RF power setting is 35W but the real value is only 24-26W and reflected is 7W, the bias is only 
-12--14V from -49V last time. The etching rate decreased by a factor of 7. Tolarance check will showing problem and machine will stop. It's the same for program vijid(?) since it's almost the same program.
Nong




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