Shutdown pquest 2002-06-12 14:33:17: it happened again....
sabnis at snf.stanford.edu
sabnis at snf.stanford.edu
Wed Jun 12 02:33:18 PDT 2002
Len and Caesar:
I am sorry to report another wafer misload. As Len
instructed me to do yesterday, I loaded and unloaded
the wafer several times before running my process
to verify that everything is okay. The error today occurred
during the loading phase - as the pins went up the
wafer seemed to get stuck in the groove of the
wafer arm for a brief moment. It then jumped up a bit
and was not loaded onto the pins properly. I managed to
hit escape before the wafer broke. My sample is attached
to the carrier wafer and I would very much like to retrieve it.
Since Len is on vacation, I will try to find Caesar at 4pm
today to get this fixed. You guys must think I am a fool
since this happened three times now in recent days,
but I really believe that I am not misloading the
wafer on the wafer arm since I have been paying
extra attention to how the wafer sits on the wafer arm.
Sorry for the inconvenience.
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