From true at snf.stanford.edu Mon Mar 11 06:33:06 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Mar 11, 2002 6:33:06 PM Subject: Shutdown pquest 2002-03-11 18:33:03: problem with the pins, can't load a wafer properly Message-ID: From cbaxter at snf.stanford.edu Mon Mar 11 10:12:10 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 11, 2002 10:12:10 PM Subject: Shutdown pquest 2002-03-11 18:33:03: problem with the pins, can't load a wafer properly Message-ID: found center teflon pin to high. adjusted From hwi at snf.stanford.edu Tue Mar 19 05:42:12 2002 From: hwi at snf.stanford.edu (hwi at snf.stanford.edu) Date: Mar 19, 2002 5:42:12 PM Subject: Problem pquest 2002-03-19 17:42:11: Chamber pressure doesn't come down Message-ID: I couldn't perform my etch due to chamber pressure problem. I don't exactly know why but the chamber pressure jsut stays at 94.7mTorr and doesn't come down to 3mTorr where the plasma should ignite. Be aware! From cbaxter at snf.stanford.edu Tue Mar 19 06:49:10 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 19, 2002 6:49:10 PM Subject: Problem pquest 2002-03-19 17:42:11: Chamber pressure doesn't come down Message-ID: reset turbo pump From junxian at snf.stanford.edu Sun Mar 31 04:31:11 2002 From: junxian at snf.stanford.edu (junxian at snf.stanford.edu) Date: Mar 31, 2002 4:31:11 PM Subject: Problem pquest 2002-03-31 16:31:11: plasma problem Message-ID: the color of plasma is not right, no etch. bad noise unloading wafer. From junxian at snf.stanford.edu Sun Mar 31 04:40:47 2002 From: junxian at snf.stanford.edu (junxian at snf.stanford.edu) Date: Mar 31, 2002 4:40:47 PM Subject: Problem pquest 2002-03-31 16:40:47: no etch Message-ID: From xjyu at snf.stanford.edu Sun Mar 31 04:54:06 2002 From: xjyu at snf.stanford.edu (xjyu at snf.stanford.edu) Date: Mar 31, 2002 4:54:06 PM Subject: Problem pquest 2002-03-31 16:54:04: Message-ID: