Problem pquest 2002-03-19 17:42:11: Chamber pressure doesn't come down

hwi at snf.stanford.edu hwi at snf.stanford.edu
Tue Mar 19 05:42:12 PST 2002


I couldn't perform my etch due to chamber pressure problem. I don't exactly know why but the chamber pressure jsut stays at 94.7mTorr and doesn't come down to 3mTorr where the plasma should ignite. Be aware!




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