From cbaxter at snf.stanford.edu  Wed May  1 07:20:26 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 1, 2002 7:20:26 PM
Subject: Shutdown pquest 2002-04-29 07:15:02: Wafer lift pin is damaged.
Message-ID: <mailman.190.1357938560.25846.pquest-pcs@snf.stanford.edu>

installed new vesple lifter pins and align. chamber
will need to be condition



From true at snf.stanford.edu  Mon May  6 08:44:55 2002
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: May 6, 2002 8:44:55 PM
Subject: Shutdown pquest 2002-05-06 20:44:55: RF Out
Message-ID: <mailman.191.1357938560.25846.pquest-pcs@snf.stanford.edu>

RF Power supply is not coming on. My recipe is TRUEOXY
and uses the max RF power of 500W. I haven't seen this
error before. This was the case with both the dummy wafer and my process wafer.



From dongyi at snf.stanford.edu  Tue May  7 09:28:50 2002
From: dongyi at snf.stanford.edu (dongyi at snf.stanford.edu)
Date: May 7, 2002 9:28:50 AM
Subject: Comment pquest 2002-05-07 09:28:49: clean issue
Message-ID: <mailman.192.1357938560.25846.pquest-pcs@snf.stanford.edu>

I was suffer with the clean step after some person using high
power Polyimide etching. I suggest whenever you using the
high power Polyimide etching, you should run the Oxigen cleanstep for keeping the PQuest  chamber clean. Thank you!



From booth at snf.stanford.edu  Tue May  7 11:19:15 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 7, 2002 11:19:15 AM
Subject: Shutdown pquest 2002-05-06 20:44:55: RF Out
Message-ID: <mailman.193.1357938560.25846.pquest-pcs@snf.stanford.edu>

System runs normally.  Henry ran std. recipe with
no problems.  He then ran Randys recipe - RF is 
set to 500W but max achievable during recipe was
~350W with 1W reflected.



From true at snf.stanford.edu  Tue May  7 01:21:18 2002
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: May 7, 2002 1:21:18 PM
Subject: Shutdown pquest 2002-05-07 13:21:17: dummy wafer broke
Message-ID: <mailman.194.1357938560.25846.pquest-pcs@snf.stanford.edu>

I think I see a chip sitting on the chuck.



From booth at snf.stanford.edu  Fri May 10 04:25:17 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 10, 2002 4:25:17 PM
Subject: Shutdown pquest 2002-05-07 13:21:17: dummy wafer broke
Message-ID: <mailman.195.1357938560.25846.pquest-pcs@snf.stanford.edu>

replaced dummy wafer, cleaned up broken wafer.
Installed new microwave window & gas diffusion
ring.  System needs to pump out overnight before
testing process.



From booth at snf.stanford.edu  Fri May 10 04:26:55 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 10, 2002 4:26:55 PM
Subject: Problem pquest 2002-05-10 16:26:54: Test process Saturday after 8am.
Message-ID: <mailman.196.1357938560.25846.pquest-pcs@snf.stanford.edu>

Let system pump out water vapor overnight
before seasoning & testing process.
Chamber has been wet cleaned.



From booth at snf.stanford.edu  Mon May 13 07:23:15 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 13, 2002 7:23:15 AM
Subject: Problem pquest 2002-05-10 16:26:54: Test process Saturday after 8am.
Message-ID: <mailman.197.1357938560.25846.pquest-pcs@snf.stanford.edu>

System is ready to test process.