Shutdown pquest 2002-05-06 20:44:55: RF Out

true at snf.stanford.edu true at snf.stanford.edu
Mon May 6 08:44:55 PDT 2002


RF Power supply is not coming on. My recipe is TRUEOXY
and uses the max RF power of 500W. I haven't seen this
error before. This was the case with both the dummy wafer and my process wafer.




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