From huac at snf.stanford.edu Fri Nov 1 06:05:15 2002 From: huac at snf.stanford.edu (huac at snf.stanford.edu) Date: Nov 1, 2002 6:05:15 PM Subject: Problem pquest 2002-11-01 18:05:13: DC bias is very low Message-ID: DC bias is very low,can't etching sample From cbaxter at snf.stanford.edu Fri Nov 1 07:13:09 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 1, 2002 7:13:09 PM Subject: Problem pquest 2002-11-01 18:05:13: DC bias is very low Message-ID: rf was out. I manually tuned match and was able to bias @-55v From huac at snf.stanford.edu Mon Nov 4 07:08:06 2002 From: huac at snf.stanford.edu (huac at snf.stanford.edu) Date: Nov 4, 2002 7:08:06 PM Subject: Problem pquest 2002-11-04 19:08:06: CD bias is very low, can't etch samples Message-ID: From cbaxter at snf.stanford.edu Mon Nov 4 08:58:42 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 4, 2002 8:58:42 PM Subject: Problem pquest 2002-11-04 19:08:06: CD bias is very low, can't etch samples Message-ID: getting good bias reading on clean recipe. From ethrush at snf.stanford.edu Tue Nov 5 02:07:24 2002 From: ethrush at snf.stanford.edu (ethrush at snf.stanford.edu) Date: Nov 5, 2002 2:07:24 PM Subject: Problem pquest 2002-11-05 14:07:23: DC bias voltage Message-ID: The RF supply seems to not be working correctly. The bias voltage is too low, around 5.4V. Other users have reported a similar problem. From cbaxter at snf.stanford.edu Tue Nov 5 08:29:31 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 5, 2002 8:29:31 PM Subject: Shutdown pquest 2002-11-05 20:29:30: tool is shutdown for low dc bias Message-ID: From hphan at snf.stanford.edu Tue Nov 19 11:11:44 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 19, 2002 11:11:44 AM Subject: Shutdown pquest 2002-11-19 11:11:43: Wafer was broken during loading! Message-ID: From cbaxter at snf.stanford.edu Tue Nov 19 06:41:26 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 19, 2002 6:41:26 PM Subject: Shutdown pquest 2002-11-19 18:41:25: maint chamber pump blown a gasket seal and spilled oil all over Message-ID: From cbaxter at snf.stanford.edu Thu Nov 21 09:13:09 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 21, 2002 9:13:09 PM Subject: Shutdown pquest 2002-11-19 18:41:25: maint chamber pump blown a gasket seal and spilled oil all over Message-ID: installed rebuild pump. pumped down chamber and and o2 plasma From cbaxter at snf.stanford.edu Thu Nov 21 09:13:34 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 21, 2002 9:13:34 PM Subject: Shutdown pquest 2002-11-19 11:11:43: Wafer was broken during loading Message-ID: cleaned up broken wafer chips From booth at snf.stanford.edu Mon Nov 25 06:58:36 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 25, 2002 6:58:36 AM Subject: Shutdown pquest 2002-11-25 06:58:35: turbo backing pump is off. Message-ID: From booth at snf.stanford.edu Mon Nov 25 07:28:44 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 25, 2002 7:28:44 AM Subject: Shutdown pquest 2002-11-25 06:58:35: turbo backing pump is off. Message-ID: Turbo controller had overcurrent protection fault restarted backing pump, roughed etch chamber, put back into standby mode. From booth at snf.stanford.edu Wed Nov 27 06:44:10 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 27, 2002 6:44:10 AM Subject: Shutdown pquest 2002-11-27 06:44:09: vacuum pump problem Message-ID: Turbo self-protected when backing pump went off. From booth at snf.stanford.edu Wed Nov 27 11:12:31 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 27, 2002 11:12:31 AM Subject: Shutdown pquest 2002-11-27 06:44:09: vacuum pump problem Message-ID: replaced oil pressure interlock switch on Turbo backing pump. Adjusted switch trip point for 5 psi. From jhaydon at snf.stanford.edu Sat Nov 30 07:33:50 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Nov 30, 2002 7:33:50 PM Subject: Shutdown pquest 2002-11-30 19:33:50: burn box failure Message-ID: