Problem pquest 2002-11-05 14:07:23: DC bias voltage

ethrush at snf.stanford.edu ethrush at snf.stanford.edu
Tue Nov 5 02:07:24 PST 2002

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The RF supply seems to not be working correctly.  The bias voltage is too low, around 5.4V.  Other users have reported a similar problem.

Previous message: Problem pquest 2002-11-04 19:08:06: CD bias is very low, can't etch samples
Next message: Shutdown pquest 2002-11-05 20:29:30: tool is shutdown for low dc bias
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