November 2002 Archives by thread

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Starting: Fri Nov 1 06:05:15 PST 2002
Ending: Sat Nov 30 07:33:50 PST 2002
Messages: 15

• Problem pquest 2002-11-01 18:05:13: DC bias is very low   huac at snf.stanford.edu
  • Problem pquest 2002-11-01 18:05:13: DC bias is very low   cbaxter at snf.stanford.edu
• Problem pquest 2002-11-04 19:08:06: CD bias is very low, can't etch samples   huac at snf.stanford.edu
  • Problem pquest 2002-11-04 19:08:06: CD bias is very low, can't etch samples   cbaxter at snf.stanford.edu
• Problem pquest 2002-11-05 14:07:23: DC bias voltage   ethrush at snf.stanford.edu
• Shutdown pquest 2002-11-05 20:29:30: tool is shutdown for low dc bias   cbaxter at snf.stanford.edu
• Shutdown pquest 2002-11-19 18:41:25: maint chamber pump blown a gasket seal and spilled oil all over   cbaxter at snf.stanford.edu
  • Shutdown pquest 2002-11-19 18:41:25: maint chamber pump blown a gasket seal and spilled oil all over   cbaxter at snf.stanford.edu
• Shutdown pquest 2002-11-19 11:11:43: Wafer was broken during loading!   hphan at snf.stanford.edu
• Shutdown pquest 2002-11-19 11:11:43: Wafer was broken during loading   cbaxter at snf.stanford.edu
• Shutdown pquest 2002-11-25 06:58:35: turbo backing pump is off.   booth at snf.stanford.edu
  • Shutdown pquest 2002-11-25 06:58:35: turbo backing pump is off.   booth at snf.stanford.edu
• Shutdown pquest 2002-11-27 06:44:09: vacuum pump problem   booth at snf.stanford.edu
  • Shutdown pquest 2002-11-27 06:44:09: vacuum pump problem   booth at snf.stanford.edu
• Shutdown pquest 2002-11-30 19:33:50: burn box failure   jhaydon at snf.stanford.edu

Last message date: Sat Nov 30 07:33:50 PST 2002
Archived on: Fri Jan 11 13:09:41 PST 2013

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