From booth at snf.stanford.edu  Thu Oct 10 06:59:06 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 10, 2002 6:59:06 AM
Subject: Shutdown pquest 2002-10-10 06:59:05: pump maintenance
Message-ID: <mailman.232.1357938560.25846.pquest-pcs@snf.stanford.edu>

high backpressure in crankcase of backing pump.



From booth at snf.stanford.edu  Thu Oct 10 07:49:36 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 10, 2002 7:49:36 AM
Subject: Shutdown pquest 2002-10-10 06:59:05: pump maintenance
Message-ID: <mailman.233.1357938560.25846.pquest-pcs@snf.stanford.edu>

spun-down turbo, shutoff backing pump,
installed new demister element, wiped up fomblin
from pump & drip tray, restarted turbo pump.
vane pump crankcase backpressure is back
to zero again.



From kaimeifu at snf.stanford.edu  Fri Oct 11 05:29:49 2002
From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu)
Date: Oct 11, 2002 5:29:49 PM
Subject: Shutdown pquest 2002-10-11 17:29:46: accidentally hit emergency stop button
Message-ID: <mailman.234.1357938560.25846.pquest-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Oct 14 01:34:34 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 14, 2002 1:34:34 PM
Subject: Shutdown pquest 2002-10-11 17:29:46: accidentally hit emergency stop button
Message-ID: <mailman.235.1357938560.25846.pquest-pcs@snf.stanford.edu>

Had difficulty getting machine to boot up cleanly.
Repaired wiring problems.



From true at snf.stanford.edu  Wed Oct 16 04:47:02 2002
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: Oct 16, 2002 4:47:02 PM
Subject: Shutdown pquest 2002-10-16 16:47:01: wafer broke on chuck
Message-ID: <mailman.236.1357938560.25846.pquest-pcs@snf.stanford.edu>

Someone changed the loading options on my recipe to Prompt for Loading. This may have something to do with why my wafer broke.



From cbaxter at snf.stanford.edu  Wed Oct 16 09:30:26 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 16, 2002 9:30:26 PM
Subject: Shutdown pquest 2002-10-16 16:47:01: wafer broke on chuck
Message-ID: <mailman.237.1357938560.25846.pquest-pcs@snf.stanford.edu>

vacuum out broken wafer chips and wet cleaned chamber



From cbaxter at snf.stanford.edu  Thu Oct 17 11:39:50 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 17, 2002 11:39:50 PM
Subject: Shutdown pquest 2002-10-17 19:01:08: broke wafer again
Message-ID: <mailman.238.1357938560.25846.pquest-pcs@snf.stanford.edu>

vacuum out broken wafer chips again



From kaimeifu at snf.stanford.edu  Fri Oct 18 10:43:18 2002
From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu)
Date: Oct 18, 2002 10:43:18 AM
Subject: Shutdown pquest 2002-10-18 10:43:17: wafer broke when unloading
Message-ID: <mailman.239.1357938560.25846.pquest-pcs@snf.stanford.edu>




From kaimeifu at snf.stanford.edu  Fri Oct 18 10:55:10 2002
From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu)
Date: Oct 18, 2002 10:55:10 AM
Subject: Problem pquest 2002-10-18 10:55:10: details of shutdown
Message-ID: <mailman.240.1357938560.25846.pquest-pcs@snf.stanford.edu>

Successfully completed 10min seasoning etch, kaimei.rcp on dummy wafer provided.  At the pins came up for unloading, the wafer tilted off of a pin.  The arm hit the wafer before I was able to press <esc>.  Wafer is in two pieces, with one piece still on arm.



From cbaxter at snf.stanford.edu  Fri Oct 18 06:24:27 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 18, 2002 6:24:27 PM
Subject: Shutdown pquest 2002-10-18 10:43:17: wafer broke when unloading
Message-ID: <mailman.241.1357938560.25846.pquest-pcs@snf.stanford.edu>

chamber was cleaned by Len. I adjusted the clamping force
and cycled load and unload wafer into chamber.



From cbaxter at snf.stanford.edu  Fri Oct 18 06:24:31 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 18, 2002 6:24:31 PM
Subject: Problem pquest 2002-10-18 10:55:10: details of shutdown
Message-ID: <mailman.242.1357938560.25846.pquest-pcs@snf.stanford.edu>




From true at snf.stanford.edu  Mon Oct 21 09:37:44 2002
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: Oct 21, 2002 9:37:44 PM
Subject: Problem pquest 2002-10-21 21:37:43: matching network problem
Message-ID: <mailman.243.1357938560.25846.pquest-pcs@snf.stanford.edu>

system not tuning properly. In auto, matching box making continuous clicking noise, power only 300W (instead of 500W), and bias is zero.



From cbaxter at snf.stanford.edu  Mon Oct 21 10:10:38 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 21, 2002 10:10:38 PM
Subject: Problem pquest 2002-10-21 21:37:43: matching network problem
Message-ID: <mailman.244.1357938560.25846.pquest-pcs@snf.stanford.edu>

I tighten the connection match to rf strap. ran o2 clean and was to tune on auto and manual



From huac at snf.stanford.edu  Thu Oct 31 02:38:22 2002
From: huac at snf.stanford.edu (huac at snf.stanford.edu)
Date: Oct 31, 2002 2:38:22 PM
Subject: Shutdown pquest 2002-10-31 14:38:21: wafer stuck in etching chamber
Message-ID: <mailman.245.1357938560.25846.pquest-pcs@snf.stanford.edu>

I run O2 cleaning with my first wafer, I can't unload the wafer after finish the run, I would like to continue mt etching process development today, please help.  Thank you!
Hua



From huac at snf.stanford.edu  Thu Oct 31 02:50:59 2002
From: huac at snf.stanford.edu (huac at snf.stanford.edu)
Date: Oct 31, 2002 2:50:59 PM
Subject: Problem pquest 2002-10-31 14:50:58: Unable to push keyboard in
Message-ID: <mailman.246.1357938560.25846.pquest-pcs@snf.stanford.edu>

beside wafer stuck in etching chamber, I can't push keyboard in after I disable the equipment.



From hphan at snf.stanford.edu  Thu Oct 31 02:59:57 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Oct 31, 2002 2:59:57 PM
Subject: Problem pquest 2002-10-31 14:50:58: CLear
Message-ID: <mailman.247.1357938560.25846.pquest-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Thu Oct 31 03:00:22 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Oct 31, 2002 3:00:22 PM
Subject: Shutdown pquest 2002-10-31 14:38:21: Broken wafer inside
Message-ID: <mailman.248.1357938560.25846.pquest-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Thu Oct 31 03:00:42 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Oct 31, 2002 3:00:42 PM
Subject: Shutdown pquest 2002-10-31 15:00:41: Broken wafer inside
Message-ID: <mailman.249.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Oct 31 09:23:19 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:23:19 PM
Subject: Shutdown pquest 2002-10-31 15:00:41: Broken wafer inside
Message-ID: <mailman.250.1357938560.25846.pquest-pcs@snf.stanford.edu>

cleaned up broken wafer  and adjusted clamping again



From cbaxter at snf.stanford.edu  Thu Oct 31 09:26:15 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:26:15 PM
Subject: Shutdown pquest 2002-10-31 21:26:15: test
Message-ID: <mailman.251.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Oct 31 09:26:26 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:26:26 PM
Subject: Shutdown pquest 2002-10-31 21:26:15: test
Message-ID: <mailman.252.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Oct 31 09:29:58 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:29:58 PM
Subject: Shutdown pquest 2002-10-31 21:29:57: coral won't allow me to clear
Message-ID: <mailman.253.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Oct 31 09:30:24 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:30:24 PM
Subject: Shutdown pquest 2002-10-31 21:29:57: coral won't allow me to clear
Message-ID: <mailman.254.1357938560.25846.pquest-pcs@snf.stanford.edu>

testing



From cbaxter at snf.stanford.edu  Thu Oct 31 09:33:03 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:33:03 PM
Subject: Comment pquest 2002-10-31 21:33:02: coral won't allow me to clear shutdown, problem has been fix
Message-ID: <mailman.255.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Oct 31 09:33:29 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:33:29 PM
Subject: Problem pquest 2002-10-31 21:33:27: test
Message-ID: <mailman.256.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Oct 31 09:33:39 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:33:39 PM
Subject: Problem pquest 2002-10-31 21:33:27: test
Message-ID: <mailman.257.1357938560.25846.pquest-pcs@snf.stanford.edu>

test



From cbaxter at snf.stanford.edu  Thu Oct 31 09:34:04 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:34:04 PM
Subject: Shutdown pquest 2002-10-31 21:34:03: test
Message-ID: <mailman.258.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Oct 31 09:34:20 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 31, 2002 9:34:20 PM
Subject: Shutdown pquest 2002-10-31 21:34:03: test
Message-ID: <mailman.259.1357938560.25846.pquest-pcs@snf.stanford.edu>

test