Problem pquest 2002-10-18 10:55:10: details of shutdown

kaimeifu at snf.stanford.edu kaimeifu at snf.stanford.edu
Fri Oct 18 10:55:10 PDT 2002


Successfully completed 10min seasoning etch, kaimei.rcp on dummy wafer provided.  At the pins came up for unloading, the wafer tilted off of a pin.  The arm hit the wafer before I was able to press <esc>.  Wafer is in two pieces, with one piece still on arm.




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