Shutdown pquest 2002-10-18 10:43:17: wafer broke when unloading

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Oct 18 06:24:27 PDT 2002


chamber was cleaned by Len. I adjusted the clamping force
and cycled load and unload wafer into chamber.




More information about the pquest-pcs mailing list